01 / Industries
Application scenarios, mapped to the standards behind them
Each industry page pairs typical test objects with the regulations that define their acceptance criteria — then shows how the QG-800 meets them.
Specialty gas valve manifold panel (VMP)
Semiconductor — Fab gas delivery & vacuum systems
Specialty gas panels, vacuum chambers and loadlocks must hold ultra-low leak rates before a fab signs off the tool.
Typical test objects
- Specialty gas lines & VMP / VMB panels
- Vacuum chambers, loadlocks & transfer modules
- Process tool hookup (secondary piping)
- Component & weld qualification
Standards & acceptance criteria
GB 50646-2020Code for design of specialty gas system engineering
SEMI F78 / F81Gas distribution system & component test methods
AcceptanceTypically ≤ 1×10⁻⁹ mbar·L/s per weld / joint
Pain point → how the QG-800 answers
Thousands of welds per tool — slow sniffing kills the schedule
→≤ 0.5 s response keeps full-panel qualification on the critical path
Oil backstreaming contaminates UHP gas lines
→Oil-free 30 m³/h dry forepump protects UHP cleanliness
Acceptance at 10⁻⁹ mbar·L/s demands deep sensitivity margin
→5.0×10⁻¹³ Pa·m³/s floor gives ≈ 3 orders of magnitude headroom
Testing Semiconductor parts?
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