01 / Product
QG-800 · Dry-pump helium leak detector
The 8 L/s dry-pump configuration: oil-free, fast, and sensitive enough for semiconductor-grade acceptance — at a production-line price.
5.0×10⁻¹³Pa·m³/s
Min. detectable leak rate (vacuum)
30m³/h
Dry forepump speed (8 L/s)
≤ 0.5 s / ≤ 3 min
Response / startup time
Technical specifications
Min. detectable leak rate (vacuum)5.0×10⁻¹³ Pa·m³/s
Min. detectable leak rate (sniffer)≤ 5.0×10⁻⁹ Pa·m³/s
Response time≤ 0.5 s
Startup time≤ 3 min
Turbo pump He speed2.5 L/s (Hicube 80)
Backing pumpDry pump 8 L/s (30 m³/h)
Detectable gases⁴He / ³He / H₂
Measurement unitsPa·m³/s, mbar·L/s, etc.
Ion sourceYttria-coated iridium, dual filaments
Mass spectrometer180° non-uniform magnetic deflection
Calibrated leakBuilt-in channel type, 10⁻⁷ mbar·L/s
InterfacesRS232 / IO
UI languagesEnglish / Chinese / Russian
Power supplyAC 220 V ±10 %
Operating environment5–40 °C, ≤ 80 % RH
Dimensions / weight869×406×926 mm / 98 kg
Source: model datasheet, 8 L/s dry-pump configuration.
02 / Configurations
Three forepump configurations
Recommended
Dry Pump 8 L/s
Forepump
Dry scroll, 30 m³/h
Best for
Semiconductor, battery, PV, pharma cleanrooms; oil-free requirements; frequent moves
Compact
Dry Pump 4 L/s
Forepump
Dry scroll, 15 m³/h class
Best for
Laboratories and moderate-duty QA benches with oil-free requirements
Economy
Oil Pump 6 L/s
Forepump
Oil-sealed rotary vane
Best for
Budget-driven general industry where oil vapor is acceptable
Vacuum-mode testing of custom chambers
Not sure which configuration fits your line?
Send us your workpiece and target leak rate. We run a free sample test and recommend the configuration with data, not guesswork.