Every micro-leak,stopped before shipment.
Oil-free helium mass spectrometer leak detectors for semiconductor fabs, battery gigafactories, PV lines, hermetic electronics and pharmaceutical CCIT.
Five industries, one sensitivity floor
Oil-free vacuum, built for clean production
No oil backstreaming — safe for UHP gas systems, cleanrooms and any surface that must stay contamination-free.
30 m³/h backing speed shortens pump-down on large chambers and repeated test cycles.
No oil changes, no mist filters, no disposal — less maintenance and fewer line stoppages.
Standards are moving. Test methods move with them.
China’s EV battery safety standard took effect 2026-07-01, raising the bar to "no fire, no explosion" — pushing quantitative leak testing into cell and pack production.
The Chinese Pharmacopoeia’s new package-integrity chapter formalizes deterministic CCIT — helium testing among the most sensitive accepted methods.
Fab gas systems are qualified weld-by-weld at ≈ 1×10⁻⁹ mbar·L/s — far beyond what pressure decay or bubble tests can see.
Hermetic military electronics are seal-graded down to the 10⁻⁸ Pa·m³/s class via helium fine-leak methods.
Traditional pressure-decay and water dunk methods stop at 10⁻³~10⁻⁴ Pa·m³/s. These standards push requirements into 10⁻⁷~10⁻¹³ Pa·m³/s — a range only helium mass spectrometry covers quantitatively.
QG-800 · 8 L/s dry-pump helium leak detector
180° magnetic-deflection mass spectrometer, yttria-coated iridium dual filaments, built-in calibrated leak, and a 30 m³/h oil-free forepump — engineered for production-line duty, not just the lab.